Particle-PLUS EXAMPLE - CCP Cleaning

Wave Front (Japanese) ＞ CAE Solution (Japanese) ＞ Particle-PULS ＞ EXAMPLE ＞ CCP Cleaning
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Computation Summary

An example of a simulation for a CCP (Capacitivery Coupled Plasma) eching is shown. (Click here or Reload this page, if PDF file is not displayed.)

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Electron Density (Download)

Ar Ion Density（Download)

Voltage (Download)